JPH0361561U - - Google Patents
Info
- Publication number
- JPH0361561U JPH0361561U JP12167889U JP12167889U JPH0361561U JP H0361561 U JPH0361561 U JP H0361561U JP 12167889 U JP12167889 U JP 12167889U JP 12167889 U JP12167889 U JP 12167889U JP H0361561 U JPH0361561 U JP H0361561U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- detector
- flow path
- gas flow
- restrictor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 12
- 239000012159 carrier gas Substances 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12167889U JPH0361561U (en]) | 1989-10-19 | 1989-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12167889U JPH0361561U (en]) | 1989-10-19 | 1989-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0361561U true JPH0361561U (en]) | 1991-06-17 |
Family
ID=31669707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12167889U Pending JPH0361561U (en]) | 1989-10-19 | 1989-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0361561U (en]) |
-
1989
- 1989-10-19 JP JP12167889U patent/JPH0361561U/ja active Pending
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